Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector

Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector

US Patent 7705301 · Granted Apr 27, 2010

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus of plural charged-particle beams2025
Multiple landing energy scanning electron microscopy systems and methods2025
Multiple charged-particle beam apparatus and methods of operating the same using2025
Multiple charged-particle beam apparatus and methods of operating the same using2025
Beam current adjustment for charged-particle inspection system2025
System and method for alignment of secondary beams in multi-beam inspection appa2025
System and method for alignment of secondary beams in multi-beam inspection appa2025
Apparatus using multiple charged particle beams2025
Apparatus using multiple charged particle beams2025
Apparatus of plural charged-particle beams2025
Apparatus using multiple beams of charged particles2025
Apparatus using multiple beams of charged particles2025