Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for increasing deposition rates of metal layers from metal-carbonyl precursors

Method for increasing deposition rates of metal layers from metal-carbonyl precursors

US Patent 7678421 · Granted Mar 16, 2010

Estimated economic value: $7,988,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Display screen or portion thereof with transitional graphical user interface of 2025
Thermal etching of ruthenium2025
Metal hard mask integration2025
Selective film formation using a self-assembled monolayer2025
Conductive superlattice structures and methods of forming the same2025
Resin composition for stereolithography2025
Resin composition for stereolithography2025
System for backside deposition of a substrate2025
Cold rolling method and method for producing cold-rolled steel sheet2025
Fan2025
Joint image unfolding apparatus, joint image unfolding method, and joint image u2025
Meniscus projection plane setting apparatus, meniscus projection plane setting m2025