Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus for the removal of an edge polymer from a substrate and methods therefor

Apparatus for the removal of an edge polymer from a substrate and methods therefor

US Patent 7651585 · Granted Jan 26, 2010

Estimated economic value: $9,173,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Resistive random access memory with preformed filaments2024
Atomic layer etch and deposition processing systems including a lens circuit wit2024
Display device including a light guide plate with protrusions2024
Capping layer for a hafnium oxide-based ferroelectric material2024
Modifying ferroelectric properties of hafnium oxide with hafnium nitride layers2024
Method of etch model calibration using optical scatterometry2023
Pulsed plasma chamber in dual chamber configuration2023
Display device having a private mode and a sharing mode2023
Multi zone gas injection upper electrode system2023
Method and apparatus for determining process rate2021
Systems and methods for calibrating scalar field contribution values for a limit2021
Systems and methods for performing edge ring characterization2021