Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof

Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof

US Patent 7645989 · Granted Jan 12, 2010

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method, device and computer program for repairing a mask defect2025
Method and apparatuses for disposing of excess material of a photolithographic m2025
Method and apparatuses for disposing of excess material of a photolithographic m2024
Devices and methods for examining and/or processing an element for photolithogra2024
Method and device for generating a database of noise2024
Method and apparatuses for disposing of excess material of a photolithographic m2024
Device and method for analyzing a defect of a photolithographic mask or of a waf2023
Apparatus and method for determining a position of an element on a photolithogra2023
Apparatus and method for examining and/or processing a sample2023
Apparatus and method for determining a position of an element on a photolithogra2022
Apparatus and method for examining and/or processing a sample2022
Apparatus and method for repairing a photolithographic mask2022