Dyed photoresists and methods and articles of manufacture comprising same

Assignee

• Rohm And Haas Electronic Materials

Inventors

• James Michael Mori (9 patents)
• James W. Thackeray (94 patents)
• Roger F. Sinta (46 patents)
• Rosemary Bell (11 patents)
• Robin L. Miller-Fahey (2 patents)
• Timothy G. Adams (21 patents)
• Thomas M. Zydowsky (12 patents)
• Edward K. Pavelchek (20 patents)
• Manual doCanto (1 patents)

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