Ion sources, systems and methods

Assignee

• Alis

Inventors

• Billy W. Ward (43 patents)
• John A. Notte, IV (57 patents)
• Louis S. Farkas, III (24 patents)
• Randall G. Percival (28 patents)
• Raymond Hill (46 patents)
• Shawn McVey (8 patents)
• Johannes Bihr (8 patents)

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