Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Using time and/or power modulation to achieve dose gray-scale in optical maskless lithography

Using time and/or power modulation to achieve dose gray-scale in optical maskless lithography

US Patent 7463402 · Granted Dec 9, 2008

Estimated economic value: $1,820,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and system for calculating printed area metric indicative of stochastic v2022
Method and system for calculating probability of success or failure for a lithog2021
Shrink process aware assist features2018
System and method for wireless access point layout and network operation2017
System and method for network user isolation2017
Methods for fabricating integrated circuits using directed self-assembly includi2016
Methods for fabricating integrated circuits using directed self-assembly includi2016
Methods for fabricating integrated circuits using designs of integrated circuits2016
Methods for fabricating integrated circuits including generating photomasks for 2016
Methods for fabricating integrated circuits including generating photomasks for 2015
Methods for fabricating integrated circuits including generating photomasks for 2015
Methods for fabricating integrated circuits including topographical features for2015