Charged particle beam device with DF-STEM image valuation method

Assignee

• Hitachi High-Technologies

Inventors

• Mine Araki (2 patents)
• Shunya Watanabe (21 patents)
• Chisato Kamiya (6 patents)
• Mitsugu Sato (129 patents)
• Atsushi Takane (43 patents)
• Akinari Morikawa (6 patents)
• Atsushi Miyaki (1 patents)
• Toru Ishitani (3 patents)

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