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Home › Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatus

Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatus

US Patent 7453161 · Granted Nov 18, 2008

Estimated economic value: $2,047,000 ⓘ

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