Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation

Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation

US Patent 7427766 · Granted Sep 23, 2008

Estimated economic value: $3,259,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for selection of camera image sections2024
Arrangement for cooling a plasma-based radiation source with a metal cooling liq2017
Method and device for generating optical radiation by means of electrically oper2016
Arrangement and method for cooling a plasma-based radiation source2015
Electrode system, in particular for gas discharge light sources2014
Low ohmic through substrate interconnection for semiconductor carriers2014
Method and device for generating EUV radiation or soft X-rays2013
Method and device for generating EUV radiation or soft X-rays with enhanced effi2012
Method and device for removing particles generated by means of a radiation sourc2012
Method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp 2011
Method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp 2011
EUV plasma discharge lamp with conveyor belt electrodes2011