Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Large field of view 2X magnification projection optical system for FPD manufacture

Large field of view 2X magnification projection optical system for FPD manufacture

US Patent 7405802 · Granted Jul 29, 2008

Estimated economic value: $2,350,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lithographic apparatus and method2016
Lithographic apparatus, programmable patterning device and lithographic method2016
Lithographic apparatus and method2015
Lithographic apparatus and device manufacturing method2014
Lithographic apparatus and device manufacturing method2014
Lithographic apparatus and method2013
Lithographic apparatus, programmable patterning device and lithographic method2013
Lithographic apparatus and device manufacturing method2013
Lithographic apparatus and device manufacturing method2013
Lithographic apparatus and device manufacturing method2013
Lithographic apparatus and method2013
Lithographic apparatus and device manufacturing method2012