Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Inspection system and a method for aerial reticle inspection

Inspection system and a method for aerial reticle inspection

US Patent 7400390 · Granted Jul 15, 2008

Estimated economic value: $16,085,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Charged particle beam apparatus and method of controlling sample charge2023
On-axis illumination and alignment for charge control during charged particle be2019
Inspection of a lithographic mask that is protected by a pellicle2018
System for discharging an area that is scanned by an electron beam2018
Machine readable element and optical indicium for authenticating an item before 2017
System for discharging an area that is scanned by an electron beam2017
Inspection of a lithographic mask that is protected by a pellicle2016
Multiple optical head inspection system and a method for imaging an article2010
Method and system for the examination of specimen2010
High throughput multi beam detection system and method2009
High throughput multi beam detection system and method2009
High throughput inspection system and a method for generating transmitted and/or2009