Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System for discharging an area that is scanned by an electron beam

System for discharging an area that is scanned by an electron beam

US Patent 9673023 · Granted Jun 6, 2017

Estimated economic value: $20,400,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Charged particle beam apparatus and method of controlling sample charge2023
On-axis illumination and alignment for charge control during charged particle be2019
Inspection of a lithographic mask that is protected by a pellicle2018
System for discharging an area that is scanned by an electron beam2018
Inspection of a lithographic mask that is protected by a pellicle2016
Method and system for the examination of specimen2010
Inspection system and a method for aerial reticle inspection2008
Alternating phase-shift mask inspection method and apparatus2006