Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Cathode assembly for indirectly heated cathode ion source

Cathode assembly for indirectly heated cathode ion source

US Patent 7276847 · Granted Oct 2, 2007

Estimated economic value: $36,384,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Shadow mask apparatus and methods for variable etch depths2025
Cyclotron having continuously variable energy output2024
Modulation of rolling k vectors of angled gratings2024
Scanned angled etching apparatus and techniques providing separate co-linear rad2024
Forming variable depth structures with laser ablation2024
Spinning disk with electrostatic clamped platens for ion implantation2024
Apparatus and techniques for substrate processing using independent ion source a2024
Apparatus and techniques for substrate processing using independent ion source a2024
Apparatus and techniques for angled etching using multielectrode extraction sour2024
Apparatus and system including high angle extraction optics2024
System and methods using an inline surface engineering source2024
System and methods using an inline surface engineering source2024