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Home › Epitaxial and polycrystalline growth of Si1-x-yGexCy and Si1-yCy alloy layers on Si by UHV-CVD

Epitaxial and polycrystalline growth of Si1-x-yGexCy and Si1-yCy alloy layers on Si by UHV-CVD

US Patent 7183576 · Granted Feb 27, 2007

Estimated economic value: $7,582,000 ⓘ

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