Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma processing apparatus, and electrode structure and table structure of processing apparatus

Plasma processing apparatus, and electrode structure and table structure of processing apparatus

US Patent 7033444 · Granted Apr 25, 2006

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate support and plasma processing apparatus2025
Mounting table and plasma processing apparatus2025
Stage and plasma processing apparatus2025
Substrate support and substrate processing apparatus2024
Electrostatic chuck, focus ring, support base, plasma processing apparatus, and 2024
Plasma processing apparatus and method for manufacturing mounting stage2024
Plasma processing apparatus2024
Substrate support and plasma processing apparatus2024
Plasma processing apparatus and plasma processing method2024
Stage and plasma processing apparatus2024
Electrostatic chuck, support platform, and plasma processing apparatus2024
Electrostatic chuck for semiconductor manufacturing device2024