Polymers, resist compositions and patterning process

Assignee

• Shin-Etsu Chemical Co.
• Sumitomo Electric Industries
• Central Glass Company, Limited

Inventors

• Yuji Harada (91 patents)
• Jun Hatakeyama (570 patents)
• Yoshio Kawai (86 patents)
• Masaru Sasago (153 patents)
• Masayuki Endo (168 patents)
• Shinji Kishimura (57 patents)
• Michitaka Ootani (29 patents)
• Satoru Miyazawa (30 patents)
• Kentaro Tsutsumi (28 patents)
• Kazuhiko Maeda (140 patents)

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