Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › End point detection with imaging matching in semiconductor processing

End point detection with imaging matching in semiconductor processing

US Patent 6930782 · Granted Aug 16, 2005

Estimated economic value: $7,732,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Self-test circuit for high-definition multimedia interface integrated circuits2011
Single nanoparticle tracking spectroscopic microscope2011
Self-test circuit for high-definition multimedia interface integrated circuits2009
System and method for in situ characterization and maintenance of polishing pad 2006
Air platen for leading edge and trailing edge control2006
Neural network control of chemical mechanical planarization2006
Neural network control of chemical mechanical planarization2006
Apparatus for edge polishing uniformity control2006
Methods for reducing slurry usage in a linear chemical mechanical planarization 2005
Methods for making reinforced wafer polishing pads and apparatuses implementing 2005
Methods for monitoring and controlling chemical mechanical planarization2005
Methods for monitoring and controlling chemical mechanical planarization2005