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Home › Epitaxial and polycrystalline growth of Si1-x-yGexCy and Si1-yCy alloy layers on Si by UHV-CVD

Epitaxial and polycrystalline growth of Si1-x-yGexCy and Si1-yCy alloy layers on Si by UHV-CVD

US Patent 6908866 · Granted Jun 21, 2005

Estimated economic value: $6,933,000 ⓘ

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