Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and method for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs

Apparatus and method for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs

US Patent 6881914 · Granted Apr 19, 2005

Estimated economic value: $78,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Flexible purge management system2018
Installation for processing a semiconductor wafer and method for operating the i2006
Microscope arrangement for inspecting a substrate2006
Wafer scribing method and wafer scribing device2005
Configuration for transporting a semiconductor wafer carrier2005
Semiconductor device identification apparatus2005
Vehicle for transporting a semiconductor device carrier to a semiconductor proce2005
Light curtain system for establishing a protective light curtain, tool and syste2004
Conveying element and conveyor means for conveying wafer receptacles, and method2004
Wafer container having electrically conductive kinematic coupling groove, suppor2002
Wafer container having electrically conductive kinematic coupling groove to dete2002