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Home › Wafer container having electrically conductive kinematic coupling groove, support surface with electrically conductive kinematic coupling pin, transportation system, and method

Wafer container having electrically conductive kinematic coupling groove, support surface with electrically conductive kinematic coupling pin, transportation system, and method

US Patent 6389706 · Granted May 21, 2002

Estimated economic value: $21,954,000 ⓘ

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