Photoacid generators for use in photoresist compositions

Assignee

• Arch Specialty Chemicals

Inventors

• Lawrence Ferreira (16 patents)
• Andrew J. Blakeney (45 patents)
• Gregory Spaziano (1 patents)
• Ognian N. Dimov (17 patents)
• J. Thomas Kocab (15 patents)
• John P. Hatfield (2 patents)

View full patent text on Google Patents →