{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Metal dry etch using electronic field", "item": "https://www.patentleaderboard.com/patent/6843893"}]}
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Metal dry etch using electronic field

US Patent 6843893 · Granted Jan 18, 2005

Estimated economic value: $12,326,000 ⓘ

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