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Home › MASK DATA CORRECTION APPARATUS, FOURIER TRANSFORMATION APPARATUS, UP SAMPLING APPARATUS, DOWN SAMPLING APPARATUS, METHOD OF MANUFACTURING TRANSFER MASK, AND METHOD OF MANUFACTURING DEVICE HAVING PATTERN STRUCTURE

MASK DATA CORRECTION APPARATUS, FOURIER TRANSFORMATION APPARATUS, UP SAMPLING APPARATUS, DOWN SAMPLING APPARATUS, METHOD OF MANUFACTURING TRANSFER MASK, AND METHOD OF MANUFACTURING DEVICE HAVING PATTERN STRUCTURE

US Patent 6831997 · Granted Dec 14, 2004

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