Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Target steering system for EUV droplet generators

Target steering system for EUV droplet generators

US Patent 6792076 · Granted Sep 14, 2004

Estimated economic value: $18,752,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Toroidal spiral cascading of multiple heat engine stages in traveling wave therm2019
Electromotive drive system for use with a pump of a power-assisted steering syst2006
Laser-produced plasma EUV light source with pre-pulse enhancement2005
Laser-produced plasma EUV light source with isolated plasma2005
Erosion reduction for EUV laser produced plasma target sources2005
Erosion reduction for EUV laser produced plasma target sources2005
Erosion reduction for EUV laser produced plasma target sources2005
Droplet and filament target stabilizer for EUV source nozzles2005
Droplet and filament target stabilizer for EUV source nozzles2005
Low vapor pressure, low debris solid target for EUV production2004
Low vapor pressure, low debris solid target for EUV production2004
Low vapor pressure, low debris solid target for EUV production2004