Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Droplet and filament target stabilizer for EUV source nozzles

Droplet and filament target stabilizer for EUV source nozzles

US Patent 6864497 · Granted Mar 8, 2005

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Toroidal spiral cascading of multiple heat engine stages in traveling wave therm2019
Electromotive drive system for use with a pump of a power-assisted steering syst2006
Erosion reduction for EUV laser produced plasma target sources2005
Erosion reduction for EUV laser produced plasma target sources2005
Erosion reduction for EUV laser produced plasma target sources2005
Low vapor pressure, low debris solid target for EUV production2004
Low vapor pressure, low debris solid target for EUV production2004
Low vapor pressure, low debris solid target for EUV production2004
Target steering system for EUV droplet generators2004
Target steering system for EUV droplet generators2004
Linear filament array sheet for EUV production2004
Linear filament array sheet for EUV production2004