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Home › Scatterometry based measurements of a rotating substrate

Scatterometry based measurements of a rotating substrate

US Patent 6771374 · Granted Aug 3, 2004

Estimated economic value: $1,898,000 ⓘ

Assignee

AMD

Inventors

Bharath Rangarajan (190 patents)
Bhanwar Singh (259 patents)
Michael K. Templeton (96 patents)
Ramkumar Subramanian (251 patents)

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