Low silicon-outgassing resist for bilayer lithography

Assignee

• IBM

Inventors

• Mahmoud Khojasteh (50 patents)
• Ranee W. Kwong (45 patents)
• Kuang-Jung Chen (75 patents)
• Pushkara R. Varanasi (82 patents)
• Robert David Allen (115 patents)
• Phillip Brock (58 patents)
• Frances Anne Houle (29 patents)
• Ratnam Sooriyakumaran (119 patents)

View full patent text on Google Patents →