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Home › Semiconductor-on-insulator (SOI) wafer having a Si/SiGe/Si active layer and method of fabrication using wafer bonding

Semiconductor-on-insulator (SOI) wafer having a Si/SiGe/Si active layer and method of fabrication using wafer bonding

US Patent 6765227 · Granted Jul 20, 2004

Estimated economic value: $1,607,000 ⓘ

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