Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Calibration standard for high resolution electron microscopy

Calibration standard for high resolution electron microscopy

US Patent 6750447 · Granted Jun 15, 2004

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Strain measurement test module2014
Monitoring and control of a fabrication process2011
Monitoring and control of a fabrication process2011
Crystallographic metrology and process control2008
Crystallographic metrology and process control2008
Wrist/hand worn mirror2007
Fabrication of nano-scale temperature sensors and heaters2006
Overlay metrology using scatterometry profiling2006
Fabrication of nano-scale temperature sensors and heaters2005
Chemical mechanical polishing of dual orientation polycrystalline materials2005
Substrate topography compensation at mask design: 3D OPC topography anchored2005
Method for detecting defects in a material and a system for accomplishing the sa2005