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Home › Nitrogen-plasma treatment for reduced nickel silicide bridging

Nitrogen-plasma treatment for reduced nickel silicide bridging

US Patent 6661067 · Granted Dec 9, 2003

Estimated economic value: $2,702,000 ⓘ

Assignee

AMD

Inventors

Minh Van Ngo (301 patents)
Christy Mei-Chu Woo (96 patents)
Paul R. Besser (212 patents)
Robert A. Huertas (32 patents)

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