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Home › Method of forming a low dielectric constant film with tetramethylcyclotetrasiloxane (TMCTS) and LPCVD technique

Method of forming a low dielectric constant film with tetramethylcyclotetrasiloxane (TMCTS) and LPCVD technique

US Patent 6656854 · Granted Dec 2, 2003

Estimated economic value: $2,000 ⓘ

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