Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7381275 | Apparatus and method for manufacturing semiconductor | Kiyohiko Toshikawa, Yoshikazu Motoyama | 2008-06-03 |
| 7267848 | Method of fabricating a protective film by use of vacuum ultraviolet rays | Kiyohiko Toshikawa, Yoshikazu Motoyama | 2007-09-11 |
| 7122486 | Film forming method | Kiyohiko Toshikawa | 2006-10-17 |
| 7026257 | Method of manufacturing low dielectric film by a vacuum ultraviolet chemical vapor deposition | Kiyohiko Toshikawa, Yoshikazu Motoyama, Yousuke Motokawa, Yusuke Yagi, Tetsurou Yokoyama +1 more | 2006-04-11 |
| 6926933 | Method of manufacturing water-repelling film | Kiyohiko Toshikawa, Yoshikazu Motoyama | 2005-08-09 |
| 6656854 | Method of forming a low dielectric constant film with tetramethylcyclotetrasiloxane (TMCTS) and LPCVD technique | Kiyohiko Toshikawa, Yoshikazu Motoyama | 2003-12-02 |
| 6627560 | Method of manufacturing semiconductor device | Kiyohiko Toshikawa, Yoshikazu Motoyama | 2003-09-30 |
| 6624094 | Method of manufacturing an interlayer dielectric film using vacuum ultraviolet CVD with Xe2 excimer lamp and silicon atoms | Kiyohiko Toshikawa, Yoshikazu Motoyama, Yousuke Motokawa, Yusuke Yagi, Tetsurou Yokoyama +1 more | 2003-09-23 |
| 6457368 | Noise reduced pressure sensor | Keiji Sasaki | 2002-10-01 |
| 6186009 | Semiconductor pressure sensor for sensing fluid pressure | Akira Sawada, Keiji Sasaki | 2001-02-13 |
| 6131467 | Pressure sensor including a joint for connecting a housing and connector case together | Akira Sawada, Keiji Sasaki | 2000-10-17 |