Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11894235 | Semiconductor manufacturing device and method of polishing semiconductor substrate | Hiroyuki Baba | 2024-02-06 |
| 10892165 | Semiconductor manufacturing device and method of polishing semiconductor substrate | Hiroyuki Baba | 2021-01-12 |
| 7381275 | Apparatus and method for manufacturing semiconductor | Junichi Miyano, Yoshikazu Motoyama | 2008-06-03 |
| 7267848 | Method of fabricating a protective film by use of vacuum ultraviolet rays | Junichi Miyano, Yoshikazu Motoyama | 2007-09-11 |
| 7122486 | Film forming method | Junichi Miyano | 2006-10-17 |
| 7026257 | Method of manufacturing low dielectric film by a vacuum ultraviolet chemical vapor deposition | Yoshikazu Motoyama, Yousuke Motokawa, Yusuke Yagi, Junichi Miyano, Tetsurou Yokoyama +1 more | 2006-04-11 |
| 6926933 | Method of manufacturing water-repelling film | Junichi Miyano, Yoshikazu Motoyama | 2005-08-09 |
| 6656854 | Method of forming a low dielectric constant film with tetramethylcyclotetrasiloxane (TMCTS) and LPCVD technique | Junichi Miyano, Yoshikazu Motoyama | 2003-12-02 |
| 6627560 | Method of manufacturing semiconductor device | Junichi Miyano, Yoshikazu Motoyama | 2003-09-30 |
| 6624094 | Method of manufacturing an interlayer dielectric film using vacuum ultraviolet CVD with Xe2 excimer lamp and silicon atoms | Yoshikazu Motoyama, Yousuke Motokawa, Yusuke Yagi, Junichi Miyano, Tetsurou Yokoyama +1 more | 2003-09-23 |