Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300745 | Compound semiconductor device and method of manufacturing compound semiconductor device | Akito Iwao | 2025-05-13 |
| 10553550 | Semiconductor device, method of manufacturing semiconductor device, and antenna switch module | Hiroki Tsunemi, Hideo Yamagata | 2020-02-04 |
| 9537005 | Semiconductor device, method of manufacturing semiconductor device, and antenna switch module | Hiroki Tsunemi, Hideo Yamagata | 2017-01-03 |
| 9379239 | Semiconductor device, method of manufacturing semiconductor device, and antenna switch module | Hiroki Tsunemi, Hideo Yamagata | 2016-06-28 |
| 8987866 | Semiconductor device, method of manufacturing semiconductor device, and antenna switch module | Hiroki Tsunemi, Hideo Yamagata | 2015-03-24 |
| 7381275 | Apparatus and method for manufacturing semiconductor | Junichi Miyano, Kiyohiko Toshikawa | 2008-06-03 |
| 7267848 | Method of fabricating a protective film by use of vacuum ultraviolet rays | Junichi Miyano, Kiyohiko Toshikawa | 2007-09-11 |
| 7026257 | Method of manufacturing low dielectric film by a vacuum ultraviolet chemical vapor deposition | Kiyohiko Toshikawa, Yousuke Motokawa, Yusuke Yagi, Junichi Miyano, Tetsurou Yokoyama +1 more | 2006-04-11 |
| 6926933 | Method of manufacturing water-repelling film | Junichi Miyano, Kiyohiko Toshikawa | 2005-08-09 |
| 6656854 | Method of forming a low dielectric constant film with tetramethylcyclotetrasiloxane (TMCTS) and LPCVD technique | Junichi Miyano, Kiyohiko Toshikawa | 2003-12-02 |
| 6627560 | Method of manufacturing semiconductor device | Junichi Miyano, Kiyohiko Toshikawa | 2003-09-30 |
| 6624094 | Method of manufacturing an interlayer dielectric film using vacuum ultraviolet CVD with Xe2 excimer lamp and silicon atoms | Kiyohiko Toshikawa, Yousuke Motokawa, Yusuke Yagi, Junichi Miyano, Tetsurou Yokoyama +1 more | 2003-09-23 |
| 5923994 | Selective oxidation process | — | 1999-07-13 |