Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Contact hole fabrication with the aid of mutually crossing sudden phase shift edges of a single phase shift mask

Contact hole fabrication with the aid of mutually crossing sudden phase shift edges of a single phase shift mask

US Patent 6635388 · Granted Oct 21, 2003

Estimated economic value: $216,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and device for producing a housing2025
Power semiconductor package having first and second lead frames2025
Leadframe, encapsulated package with punched lead and sawn side flanks, and corr2024
Power module with semiconductor packages mounted on metal frame2024
Package with encapsulated electronic component between laminate and thermally co2024
Fluid-cooled package having shielding layer2024
Semiconductor package with barrier to contain thermal interface material2023
Power semiconductor module and method for producing a power semiconductor module2023
Power module comprising two substrates and method of manufacturing the same2023
Batch manufacture of packages by sheet separated into carriers after mounting of2022
Package cooled with cooling fluid and comprising shielding layer2022
Semiconductor panels, semiconductor packages, and methods for manufacturing ther2021