Process equipment selecting system and method for selecting process equipment

Assignee

• Mitsubishi Electric
• Ryoden Semiconductor System Engineering

Inventors

• Yasuhiro Sato (121 patents)
• Masaki Otani (13 patents)
• Takamasa Inobe (6 patents)
• Katsuya Ota (16 patents)
• Yasuhiro Marume (6 patents)
• Ryuji Takechi (4 patents)
• Kenji Sakaguchi (15 patents)
• Toshiyuki Watanabe (157 patents)

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