| 6823229 |
Substrate carrier management system and program |
Masaki Ootani, Yasuhiro Sato, Takamasa Inobe, Toshiyuki Watanabe |
2004-11-23 |
| 6593154 |
Apparatus and method for controlling semiconductor manufacturing system utilizing recycled wafers |
Toshiyuki Watanabe, Masaki Otani, Takamasa Inobe, Yasuhiro Sato |
2003-07-15 |
| 6529792 |
Process equipment selecting system and method for selecting process equipment |
Yasuhiro Sato, Masaki Otani, Takamasa Inobe, Katsuya Ota, Ryuji Takechi +2 more |
2003-03-04 |
| 6480755 |
Process control device and process control method permitting processing order and processing condition to be changed while manufacturing process continues |
Masaki Ootani, Ryuji Takechi, Takamasa Inobe, Katuya Oota, Yasuhiro Satou |
2002-11-12 |
| 6463348 |
Process control device and process control method enabling restoration of lot control |
Ryuji Takechi, Masaki Ootani, Takamasa Inobe, Katuya Oota, Yasuhiro Satou |
2002-10-08 |
| 6397119 |
Semiconductor manufacturing system for simultaneous processing of prescribed number of lots |
Ryuji Takechi, Masaki Ootani, Takamasa Inobe, Katuya Oota, Yasuhiro Satou |
2002-05-28 |
