Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6823229 | Substrate carrier management system and program | Masaki Ootani, Yasuhiro Sato, Yasuhiro Marume, Toshiyuki Watanabe | 2004-11-23 |
| 6593154 | Apparatus and method for controlling semiconductor manufacturing system utilizing recycled wafers | Yasuhiro Marume, Toshiyuki Watanabe, Masaki Otani, Yasuhiro Sato | 2003-07-15 |
| 6529792 | Process equipment selecting system and method for selecting process equipment | Yasuhiro Sato, Masaki Otani, Katsuya Ota, Yasuhiro Marume, Ryuji Takechi +2 more | 2003-03-04 |
| 6480755 | Process control device and process control method permitting processing order and processing condition to be changed while manufacturing process continues | Masaki Ootani, Ryuji Takechi, Yasuhiro Marume, Katuya Oota, Yasuhiro Satou | 2002-11-12 |
| 6463348 | Process control device and process control method enabling restoration of lot control | Ryuji Takechi, Yasuhiro Marume, Masaki Ootani, Katuya Oota, Yasuhiro Satou | 2002-10-08 |
| 6397119 | Semiconductor manufacturing system for simultaneous processing of prescribed number of lots | Yasuhiro Marume, Ryuji Takechi, Masaki Ootani, Katuya Oota, Yasuhiro Satou | 2002-05-28 |