Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6529792 | Process equipment selecting system and method for selecting process equipment | Yasuhiro Sato, Masaki Otani, Takamasa Inobe, Katsuya Ota, Yasuhiro Marume +2 more | 2003-03-04 |
| 6480755 | Process control device and process control method permitting processing order and processing condition to be changed while manufacturing process continues | Masaki Ootani, Yasuhiro Marume, Takamasa Inobe, Katuya Oota, Yasuhiro Satou | 2002-11-12 |
| 6463348 | Process control device and process control method enabling restoration of lot control | Yasuhiro Marume, Masaki Ootani, Takamasa Inobe, Katuya Oota, Yasuhiro Satou | 2002-10-08 |
| 6397119 | Semiconductor manufacturing system for simultaneous processing of prescribed number of lots | Yasuhiro Marume, Masaki Ootani, Takamasa Inobe, Katuya Oota, Yasuhiro Satou | 2002-05-28 |