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Home › Automated periodic focus and exposure calibration of a lithography stepper

Automated periodic focus and exposure calibration of a lithography stepper

US Patent 6501534 · Granted Dec 31, 2002

Estimated economic value: $2,157,000 ⓘ

Assignee

AMD

Inventors

Bhanwar Singh (259 patents)
Ramkumar Subramanian (251 patents)
Bharath Rangarajan (190 patents)
Carmen Morales (14 patents)

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