Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Low-sputter-yield coating for hardware near laser-produced plasma

Low-sputter-yield coating for hardware near laser-produced plasma

US Patent 6479830 · Granted Nov 12, 2002

Estimated economic value: $10,961,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Laser-produced plasma EUV light source with pre-pulse enhancement2005
Laser-produced plasma EUV light source with pre-pulse enhancement2005
Laser-produced plasma EUV light source with isolated plasma2005
Erosion reduction for EUV laser produced plasma target sources2005
Smart license tag system2005
Low vapor pressure, low debris solid target for EUV production2004
Target steering system for EUV droplet generators2004
Millimeter wave instant photographic camera1999
Focal plane array calibration method1998