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Home › Method of fabrication of semiconductor-on-insulator (SOI) wafer having a Si/SiGe/Si active layer

Method of fabrication of semiconductor-on-insulator (SOI) wafer having a Si/SiGe/Si active layer

US Patent 6410371 · Granted Jun 25, 2002

Estimated economic value: $2,000,000 ⓘ

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