Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge

Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge

US Patent 6389106 · Granted May 14, 2002

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Microscopic system for testing structures and defects on EUV lithography photoma2023
Method for improving the wettability of a rotating electrode in a gas discharge 2017
Method and device for generating optical radiation by means of electrically oper2016
Composition for anionic lactam polymerization2016
Method and apparatus for the generation of short-wavelength radiation by means o2013
Method and arrangement for the adjustment of characteristics of a beam bundle of2013
Method and arrangement for cleaning optical surfaces in plasma-based radiation s2012
Method and device for generating EUV radiation and/or soft X-ray radiation2010
Extreme UV and soft X ray generator2010
Extreme UV and soft X ray generator2010
Method and device for producing extreme ultraviolet radiation or soft X-ray radi2009
Method and device for the generation of a plasma through electric discharge in a2009