Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Process for etching oxide using a hexafluorobutadiene and manifesting a wide process window

Process for etching oxide using a hexafluorobutadiene and manifesting a wide process window

US Patent 6387287 · Granted May 14, 2002

Estimated economic value: $48,008,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Stator core, motor, power assembly, automobile and vehicle2025
Hydraulic control valve, hydraulic control system, and transmission2025
Method and device for controlling engine to shut down, and electronic device and2025
On-board cleaning of tooling parts in hybrid bonding tool2025
Dual-motor multi-gear hybrid transmission system and vehicle2024
Crystalline forms of a compound for treating or preventing gout or hyperuricemia2024
Axially-limited guide device, parking mechanism, and automobile2024
Semiconductor processing system2024
Salient pole type hybrid excitation motor2024
Vehicle DC voltage conversion circuit2024
Method of patterning a thin-film photovoltaic layer stack2024
Three-way catalytic converter preheating control method and system, vehicle and 2024