Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of correcting alignment

Method of correcting alignment

US Patent 6338971 · Granted Jan 15, 2002

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method, equipment, and recording medium for controlling exposure accuracy2003
Semiconductor device production management system, and semiconductor device prod2003
METHOD OF INCREASING OVERLAY ACCURACY IN AN EXPOSURE STEP AND OVERLAY DISPLACEME2003
Method and apparatus for processing order control2002
Method for correcting alignment, method for manufacturing a semiconductor device2002
Pyrazolo[1,5-a]pyrimidine derivatives2002
Photolithography processing based on fresh calibration parameter values2002
Naphthyridine derivatives2001
Exposure method, exposure apparatus and semiconductor device manufactured by usi2001
Method of improving registration accuracy and method of forming patterns on a su2001
Method for correcting alignment, method for manufacturing a semiconductor device2001
Overlay error determination mark considering influence of aberration2000