Ester compounds, polymers, resist compositions and patterning process

Assignee

• Shin-Etsu Chemical Co.

Inventors

• Takeshi Kinsho (262 patents)
• Tsunehiro Nishi (88 patents)
• Hideshi Kurihara (44 patents)
• Koji Hasegawa (257 patents)
• Takeru Watanabe (188 patents)
• Osamu Watanabe (275 patents)
• Mutsuo Nakashima (70 patents)
• Takanobu Takeda (50 patents)
• Jun Hatakeyama (570 patents)

View full patent text on Google Patents →