Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Spin coating bowl exhaust system

Spin coating bowl exhaust system

US Patent 6221157 · Granted Apr 24, 2001

Estimated economic value: $16,055,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Protection tampon and method of making2012
Protection tampon and method of making2010
Spin coating for maximum fill characteristic yielding a planarized thin film sur2007
Spin coating for maximum fill characteristic yielding a planarized thin film sur2006
Methods of managing the symptoms of premenstrual syndrome2006
Method for pretreating a substrate prior to application of a polymeric coat2005
Rotating gripper wafer flipper2005
Rotating gripper wafer flipper2005
Protection tampon and method of making2005
Rotating gripper wafer flipper2004
Develop processing method of a resist surface on a substrate for reduced process2004
Method for pretreating a substrate prior to application of a polymeric coat2004