| 6403933 |
Thermal conditioning apparatus |
Timothy A. Strodtbeck, Bruce L. Hayes, Rex A. Smith, Shawn D. Davis |
2002-06-11 |
| 6221157 |
Spin coating bowl exhaust system |
Shawn D. Davis, Bruce L. Hayes, John Davlin |
2001-04-24 |
| 6171402 |
Thermal conditioning apparatus |
Timothy A. Strodtbeck, Bruce L. Hayes, Rex A. Smith, Shawn D. Davis |
2001-01-09 |
| 6162294 |
Spin coating bowl exhaust system |
Shawn D. Davis, Bruce L. Hayes, John Davlin |
2000-12-19 |
| 6150638 |
Thermal conditioning apparatus |
Timothy A. Strodtbeck, Bruce L. Hayes, Rex A. Smith, Shawn D. Davis |
2000-11-21 |
| 6132802 |
Methods for exhausting a wafer coating apparatus |
Shawn D. Davis, Bruce L. Hayes, John Davlin |
2000-10-17 |
| 6107609 |
Thermal conditioning apparatus |
Timothy A. Strodtbeck, Bruce L. Hayes, Rex A. Smith, Shawn D. Davis |
2000-08-22 |
| 6090209 |
Thermal conditioning apparatus |
Timothy A. Strodtbeck, Bruce L. Hayes, Rex A. Smith, Shawn D. Davis |
2000-07-18 |
| 6051074 |
Thermal conditioning apparatus |
Timothy A. Strodtbeck, Bruce L. Hayes, Rex A. Smith, Shawn D. Davis |
2000-04-18 |
| 5885353 |
Thermal conditioning apparatus |
Timothy A. Strodtbeck, Bruce L. Hayes, Rex A. Smith, Shawn D. Davis |
1999-03-23 |
| 5769945 |
Spin coating bowl exhaust system |
Shawn D. Davis, Bruce L. Hayes |
1998-06-23 |
| 5759007 |
Notch finder and combination wafer transfer machine |
Ernest C. Nichols, Brian D. Brown, Timothy A. Strodtbeck, Kevin A. Larsen, Shelby K. Moore |
1998-06-02 |