Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7202138 | Spin coating for maximum fill characteristic yielding a planarized thin film surface | John Whitman | 2007-04-10 |
| 7101771 | Spin coating for maximum fill characteristic yielding a planarized thin film surface | John Whitman | 2006-09-05 |
| 6946407 | Method for pretreating a substrate prior to application of a polymeric coat | Douglas S. Schramm, Lorna M. Mitson | 2005-09-20 |
| 6806209 | Develop processing method of a resist surface on a substrate for reduced processing time and reduced defect density | Greg Montanino | 2004-10-19 |
| 6784120 | Method for pretreating a substrate prior to application of a polymeric coat | Douglas S. Schramm, Lorna M. Mitson | 2004-08-31 |
| 6680078 | Method for dispensing flowable substances on microelectronic substrates | Greg Montanino | 2004-01-20 |
| 6559072 | Develop processing method of a resist surface of a substrate for reduced processing time and reduced defect density | Greg Montanino | 2003-05-06 |
| 6461983 | Method for pretreating a substrate prior to application of a polymeric coat | Douglas S. Schramm, Lorna M. Mitson | 2002-10-08 |
| 6221157 | Spin coating bowl exhaust system | Shawn D. Davis, John S. Molebash, Bruce L. Hayes | 2001-04-24 |
| 6162294 | Spin coating bowl exhaust system | Shawn D. Davis, John S. Molebash, Bruce L. Hayes | 2000-12-19 |
| 6132802 | Methods for exhausting a wafer coating apparatus | Shawn D. Davis, John S. Molebash, Bruce L. Hayes | 2000-10-17 |